Vacuum Pump Oil & Greases

Kelly Vacuum Technologies is pleased to offer high quality vacuum pump oil and greases, backed by over forty years of applied vacuum research and development. All our vacuum pump fluids are manufactured from new materials. You can purchase our fluids at our Online Vacuum Store or by calling us toll free at 1-877-535-5990.

Silicone Diffusion Pump Fluids

702 Silicone - A phenylmethyl silicone ring compound formulated as a diffusion pump fluid for pumping high gas loads. Widely used when rapid cycling is required. Saturated vapor pressure at 20 C - 1.875 x 10^-6 torr. Available in 500ml, 1 quart, 1 gallon and 5 gallons.

704 Silicone - Tetramethyl tetraphenyl trisiloxane is a linear compound providing excellent resistance to oxidation, with fast pumpdown times to its ultimate pressure. Saturated vapor pressure at 20 C - 2.25 x 10^-8 torr. Available in 500ml, 1 quart, 1 gallon and 5 gallons.

Our Exclusive 704A Silicone - A unique, lower priced silicone oil essentially of: tetramethyl tetraphenyl cyclosiloxane, typically having working characteristics associated with the traditional silicone, 704.
The performance of 704A will match 704 in the vast majority of applications without any perceivable change in performance while still providing high resistance to oxidation, coupled with a high autoignition temperature. Saturated vapor pressure at 20 C - 3.75 x 10^-8 torr.
Boiling point @ .375 torr - 215 C
Viscosity @ 40 C - 27.00 cSt
Flash point - 220 C
Autoignition - 400 C
Specific gravity @ 20C - 1.07 to 1.10 g/cm³
Available in 500ml, 1 quart, 1 gallon and 5 gallons.

705 Silicone - Pentaphenyl trisiloxane has excellent pressure characteristics, ideal for ultra high vacuum applications where extremely low rates of backstreaming are required. Saturated vapor pressure at 20 C - 2.25 x 10^-10 torr. Available in 500ml, 1 quart, 1 gallon and 5 gallons.

DP 5 Fluid - Polyphenyl-ether diffusion pump fluid (Replacement for Santovac 5 & Convalex 10) - A highly refined polyphenyl-ether diffusion pump fluid formulated to operate within the pressure range of 10^-9 to 10^-10 torr. Reduced rates of back streaming and creep, provide a cleaner chamber environment when compared with other fluids.

Hydrocarbon Fluids

KVT 19 Mechanical Pump Fluid - KVT 19 is recommended for use in noncorrosive applications. Through molecular distillation light end fractions are removed, resulting in lower vapor pressure and reduced backstreaming compared to undistilled refinery products. Saturated vapor pressure @ 25 C = 1.0 x 10^-5 torr.
Available in 1 quart, 1 gallon, 5 gallons and 55 gallon drums.

KVT 20 Pump Fluid - KVT 20 is the saturated mechanical pump fluid used in applications involving corrosive or reactive gases. This fluid has been distilled to remove the majority of the light fractions present in all raw material feedstock. It is also used as a diffusion pump fluid. Saturated vapor pressure @ 25 C = 3.0 x 10^-6 torr.
Available in 1 quart, 1 gallon, 5 gallons and 55 gallon drums.
This fluid can be reclaimed. Please call us for details.

KVT TW Mechanical Pump Fluid - TW fluid is specifically recommended for applications where exposure to reactive or corrosive gasses is prevalent. This product is a distilled hydrocarbon containing no additives. Vapor pressure @ 25 C = <1.0 x 10^-6 torr.
Available in 1 quart, 1 gallon, 5 gallons and 55 gallon drums.
This fluid can be reclaimed. Please call us for details.

MH200 Diffusion Pump Fluid (Replacement for Convoil 20 & Invoil 20) - A cost effective mineral hydrocarbon, diffusion pump fluid. Best suited for applications where high gas loads are encountered and frequent oil changes are required. This fluid can also be used in some booster pump applications. Saturated vapor pressure at 20 C - 3.75 x 10^-7 torr.
Available in 1 gallon, 5 gallons and 48 gallons.

MH201 Booster Pump Fluid (Replacement for Apiezon 201) - A booster pump fluid derived from a first class hydrocarbon material, protected against air abuse by an anti-oxidation of matched vapor pressure. Principally used for the processing of high grade steels and alloys where high gas loads are encountered at pressures of a few microns. Saturated vapor pressure at 20 C - 3.75 x 10^-6 torr.
Available in 1 gallon, 5 gallons and 48 gallons.

MH700 Diffusion Pump Fluid (Replacement for Convoil 20) - An effective and efficient alternative fluid to silicone oils. Our 700, high oxidation resistant fluid, provides the fastest pumping speeds to ultimate pressure. As an all purpose diffusion pump fluid, 700 has found applications in universities, government facilities and industrial companies. Saturated vapor pressure at 20 C - 3.75 x 10^-7 torr.
Available in 500ml, 1 quart, 1 gallon and 5 gallons.

MH800 Diffusion Pump Fluid (Replacement for Apiezon C & Diffelene) - This fluid is a thermally stable white hydrocarbon oil having a lower saturated vapor pressure versus viscosity when compared with other diffusion pump oils. The low molecular weight distribution results in high dynamic pumping speeds and low rates of back streaming. Saturated vapor pressure at 25 C - 2.4 x 10^-8 torr. Ultimate LN₂ - 1.12 x 10^-10 torr.
Available in 500ml, 1 quart, 1 gallon and 5 gallons.

 

Perfluoro Polyether Fluids (PFPE) - Fomblin

Perfluoro polyether, rotary pump oils are inert to most reactive chemicals such as UF₆, F₂, FC₁₃, BF₃, O₂ and O₃ to name a few. The linear molecular structure of the polymer permits its use up to 370 C without degradation. Saturated vapor pressure at 20 C - 1.5 x 10^-6 torr.

Types 06/6, 14/6, 16/6 and 25/6 are available in 1 kg, 2 kg, 4 kg or 8 kg.

 

Vacuum Greases

PFPE - An inert perfluropolyether, high temperature grease used in applications where aggressive chemicals are employed. Suitable working range -10 C to 175 C
Saturated vapor pressure at 20 C - 10^-10 torr.
Available in 25 grams or 50 grams.

Silicone High Vacuum Grease - A silicone high vacuum grease suitable for use in the temperature range of -40 C to 250 C. Saturated vapor pressure at 20 C - 10^-10 torr.
Available in 100 gram tubes or 5 kg pales.

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Santovac 5 is a registered trademark of Santovac Fluids, Inc.
Convalex 10, Convoil 20 & Invoil 20 are registered trademarks of Inland Vacuum
Fomblin is a registered trademark of Ausimont
Diffelene is a registered trademark of Leybold